Spectroscopic ellipsometry analysis for investigation of the modification of thin film p-a-Si1−xCx:H after ultraviolet treatment in an Argon ambient
Seung Yeop Myong; Sang Soo Kim; Koeng Su Lim
- 作者Seung Yeop Myong; Sang Soo Kim; Koeng Su Lim
- 印刷ISSN0040-6090
- 文件大小250.57KB
- 发表时间2004
- DOI10.1016/j.tsf.2004.01.018
- 页码482-485