Dependence of Differential Phase Detection Signals on Astigmatism in a Focused Spot
- 期刊名称Japanese Journal of Applied Physics
- 作者Shinoda, Masahisa; Nakai, Kenya; Mori, Kazuo
- 卷第43卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小312.55KB
- 发表时间2004-7-29
- DOI10.1143/JJAP.43.4870
- 页码4870-4875
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