![SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - <title>Scribing characteristics of ceramics with Nd:YLF laser</title>]()
SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - <title>Scribing characteristics of ceramics with Nd:YLF laser</title>Iwai, Y.; Mizuno, T.; Arai, T.; Honda, T.; Tanaka, Ryuzo; Takaoka, T.; Miyamoto, Isamu; Ostendorf, Andreas; Sugioka, Koji; Helvajian, Henry · 2003