SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Smart Structures and Integrated Systems - Design and analysis of multidegrees of freedom micromirror for triangular wave scanning
- 作者Bucher, Izhak; Flatau, Alison B.; Avivi, Gal; Velger, Marko
- 卷第5390卷
- 印刷ISSN0277-786X
- 文件大小2792.16KB
- 发表时间2004
- DOI10.1117/12.538376
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