![[IEEE Proceedings of the 2005, American Control Conference, 2005. - Portland, OR, USA (June 8-10, 2005)] Proceedings of the 2005, American Control Conference, 2005. - A novel sensing scheme for the displacement of electrostatically actuated microcantilevers]()
[IEEE Proceedings of the 2005, American Control Conference, 2005. - Portland, OR, USA (June 8-10, 2005)] Proceedings of the 2005, American Control Conference, 2005. - A novel sensing scheme for the displacement of electrostatically actuated microcantileversNapoli, M.; Olroyd, C.; Bamieh, B.; Turner, K. · 2005