![SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MOEMS and Miniaturized Systems IV - Low-voltage 256-electrode membrane mirror system for adaptive optics]()
SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MOEMS and Miniaturized Systems IV - Low-voltage 256-electrode membrane mirror system for adaptive opticsKurczynski, Peter L.; El-Fatatry, Ayman; Dyson, Harold M.; Sadoulet, Bernard; Bower, J. E.; Lai, Warren Y.; Mansfield, William M.; Taylor, J. A. · 2004