海量图书期刊资源,随时随地畅享阅读乐趣
Fabrication and operation of an electrostatic actuator for controlling nanometer-scale gaps in collapsed cantilever heterostructuresChan, Wing S.; Saarinen, Mika J.; Talghader, Joseph J. · Applied Physics Letters · 2013
[IEEE Nanophotonics - Istanbul, Turkey (2011.08.8-2011.08.11)] 16th International Conference on Optical MEMS and Nanophotonics - Cantilever actuator processing to control photoluminescence of quantum wells coupled across nanoscale air gapsChan, Wing S.; Saarinen, Mika. J.; Talghader, Joseph J. · 2011