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SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - <title>Packaged MEMS and MOEMS measurement using through-transmissive-media (TTM) profiler</title>

SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - Packaged MEMS and MOEMS measurement using through-transmissive-media (TTM) profiler

Han, Sen; Esashi, Masayoshi; Zhou, Zhaoying

作者Han, Sen; Esashi, Masayoshi; Zhou, Zhaoying
卷第6032卷
印刷ISSN0277-786X
文件大小399.63KB
发表时间2006
DOI10.1117/12.667846

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