Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering
- 作者Monjoy Sreemany; Suchitra Sen
- 卷第253卷
- 期第5期
- 印刷ISSN0169-4332
- 文件大小638.12KB
- 发表时间2006
- DOI10.1016/j.apsusc.2006.05.040
- 页码2739-2746
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