Growth and Electrical Characterization of 4H-SiC Epilayers
- 期刊名称Materials Science Forum
- 作者Kimoto, Tsunenobu; Danno, Katsunori; Hori, T.; Matsunami, Hiroyuki
- 电子ISSN1662-9752
- 文件大小446.99KB
- 发表时间2007
- DOI10.4028/www.scientific.net/MSF.556-557.35
- 页码35-40
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