Effect of Acid Diffusion and Polymer Structure on Line Edge Roughness
- 期刊名称Japanese Journal of Applied Physics
- 作者Yamamoto, Hiroki; Kozawa, Takahiro; Saeki, Akinori; Okamoto, Kazumasa; Tagawa, Seiichi; Ohmori, Katsumi; Sato, Mitsuru; Komano, Hiroji
- 卷第46卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小1867.80KB
- 发表时间2007-9-20
- DOI10.1143/JJAP.46.6187
- 页码6187-6190
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