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Single-Component Chemically Amplified Resist Based on Dehalogenation of Polymer

Yamamoto, Hiroki; Kozawa, Takahiro; Tagawa, Seiichi; Ohmori, Katsumi; Sato, Mitsuru; Komano, Hiroji

期刊名称Japanese Journal of Applied Physics
作者Yamamoto, Hiroki; Kozawa, Takahiro; Tagawa, Seiichi; Ohmori, Katsumi; Sato, Mitsuru; Komano, Hiroji
卷第46卷
印刷ISSN0021-4922
文件大小264.97KB
发表时间2007-6-29
DOI10.1143/JJAP.46.L648