![Behaviour of a Well-Designed Megasonic Cleaning System]()
Behaviour of a Well-Designed Megasonic Cleaning SystemLippert, Alexander; Engesser, P.; Ferrell, Garry; Klitzke, J.; Köffler, Martin; Kumnig, Franz; Leberzammer, Jörg; Pfeuffer, Alexander; Obweger, Rainer; Sax, Harry; Okorn-Schmidt, Harald · Solid State Phenomena · 2005