![Diffusion barrier and electrical characteristics of a self-aligned MgO layer obtained from a Cu(Mg) alloy film]()
Diffusion barrier and electrical characteristics of a self-aligned MgO layer obtained from a Cu(Mg) alloy filmLee, W. H.; Cho, H. L.; Cho, B. S.; Kim, J. Y.; Nam, W. J.; Kim, Y-S.; Jung, W. G.; Kwon, H.; Lee, J. H.; Lee, J. G.; Reucroft, P. J.; Lee, C. M.; Lee, E. G. · Applied Physics Letters · 2000