![The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition]()
The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor depositionWang, Qi; Wang, Chengbing; Wang, Zhou; Zhang, Junyan; He, Deyan · Applied Physics Letters · 2008