![[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Investigation of substrate damage and other issues in hydrogen plasma implantation for silicon-on-insulator (SOI) fabrication]()
[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Investigation of substrate damage and other issues in hydrogen plasma implantation for silicon-on-insulator (SOI) fabricationFu, R.K.Y.; Wang, L.W.; Chu, P.K. · 2001