Growth of ultra-thin SiO 2 by laser-induced oxidation
- 期刊名称Semiconductor Science and Technology
- 作者Kailath, Binsu J; DasGupta, Amitava; DasGupta, Nandita; Singh, B N; Kukreja, L M
- 卷第24卷
- 期第10期
- 印刷ISSN0268-1242
- 电子ISSN1361-6641
- 文件大小412.75KB
- 发表时间2009-10-01
- DOI10.1088/0268-1242/24/10/105011
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