![[IEEE Proceedings of the 2002 14th International Conference on Ion Implantation Technology - Taos, New Mexico, USA (2002.9.22-2002.9.27)] Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on - SIMOX wafer fabrication by 100mA O<sup>+</sup> implantation using the UI-6000 implanter]()
[IEEE Proceedings of the 2002 14th International Conference on Ion Implantation Technology - Taos, New Mexico, USA (2002.9.22-2002.9.27)] Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on - SIMOX wafer fabrication by 100mA O<sup>+</sup> implantation using the UI-6000 implanterTokiguchi, K.; Seki, H.; Seki, T.; Itou, J.; Higuchi, Y.; Mera, K.; Tanaka, S.; Yamashita, Y.; Hashimoto, I.; Yoshikawa, A. · 2002