![[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy]()
[IEEE 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - St. Petersburg, Russia (2016.10.2-2016.10.4)] 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) - Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron SpectroscopyAfanas'ev, Victor P.; Gryazev, Alexander S.; Kaplya, Pavel S.; Efremenko, Dmitry S.; Ridzel, Olga Yu. · 2016