Experimental validation of compact damping models of perforated MEMS devices
- 作者Timo Veijola; Giorgio De Pasquale; Aurelio Somà
- 卷第15卷
- 期第8期
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小381.28KB
- 发表时间2009-08
- DOI10.1007/s00542-009-0793-6
- 页码1121-1128
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