![Characterization of excimer laser annealed polycrystalline Si[sub 1âx]Ge[sub x] alloy thin films by x-ray diffraction and spectroscopic ellipsometry]()
Characterization of excimer laser annealed polycrystalline Si[sub 1âx]Ge[sub x] alloy thin films by x-ray diffraction and spectroscopic ellipsometryYu, Guolin; Krishna, Kalaga Murali; Shao, Chunlin; Umeno, Masayoshi; Soga, Tetsuo; Watanabe, Junji; Jimbo, Takashi · Journal of Applied Physics · 1998