Enhancement of ion-induced bending phenomenon using a double-layered film for field emitter array fabrication
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Yoshida, T.; Nagao, M.; Kanemaru, S.
- 卷第28卷
- 期第2期
- 印刷ISSN1071-1023
- 文件大小589.13KB
- 发表时间2010
- DOI10.1116/1.3276096
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