Study of Grating Structures Transferred to Glass Substrates via Corona Charging
Sakai, Daisuke; Miho, Daichi; Harada, Kenji; Barada, Daisuke; Fukuda, Takashi
- 期刊名称Japanese Journal of Applied Physics
- 作者Sakai, Daisuke; Miho, Daichi; Harada, Kenji; Barada, Daisuke; Fukuda, Takashi
- 卷第49卷
- 期第1期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小544.62KB
- 发表时间2010-1-20
- DOI10.1143/JJAP.49.01AE01