Internal Stress and Microstructure of Zinc Oxide Films Sputter-Deposited with Carbon Dioxide Gas
- 期刊名称Japanese Journal of Applied Physics
- 作者Ashida, Toru; Kato, Kazuhiro; Omoto, Hideo; Takamatsu, Atsushi
- 卷第49卷
- 期第6期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小207.47KB
- 发表时间2010-6-21
- DOI10.1143/JJAP.49.065501
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