Dynamic photoluminescence lifetime imaging for the characterisation of silicon wafers
- 作者Sandra Herlufsen; Klaus Ramspeck; David Hinken; Arne Schmidt; Jens Müller; Karsten Bothe; Jan Schmidt; Rolf Brendel
- 卷第5卷
- 期第1期
- 印刷ISSN1862-6254
- 电子ISSN1862-6270
- 文件大小447.33KB
- 发表时间2011
- DOI10.1002/pssr.201004426
- 页码25-27
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