[MEMS Reference Shelf] MEMS Reliability || Failure Modes and Mechanisms: Failure Modes and Mechanisms in MEMS
- 作者Hartzell, Allyson L.; da Silva, Mark G.; Shea, Herbert R.
- 文件大小2338.17KB
- 发表时间2011
- DOI10.1007/978-1-4419-6018-4_3
- 页码43-83
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