Thermoelastic Damping in Micromechanical Resonators with a Proof Mass and a Network of Suspension Beams
- 期刊名称Japanese Journal of Applied Physics
- 作者Li, Pu; Hu, Rufu
- 卷第50卷
- 期第7期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小205.49KB
- 发表时间2011-7-20
- DOI10.1143/JJAP.50.077202
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