海量图书期刊资源，随时随地畅享阅读乐趣
Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric propertiesStoeckel, C.; Kaufmann, C.; Hahn, R.; Schulze, R.; Billep, D.; Gessner, T. · Journal of Applied Physics · 2014