[IEEE 2012 19th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2012) - Seville, Seville, Spain (2012.12.9-2012.12.12)] 2012 19th IEEE International Conference on Electronics, Circuits, and Systems (ICECS 2012) - Analysis of coupling capacitance between TSVs and metal interconnects in 3D-ICs