![[IEEE 2015 IEEE International Conference on Mechatronics (ICM) - Nagoya, Japan (2015.3.6-2015.3.8)] 2015 IEEE International Conference on Mechatronics (ICM) - Use of MEMS accelerometers for load position estimation of ball-screw driven table systems]()
[IEEE 2015 IEEE International Conference on Mechatronics (ICM) - Nagoya, Japan (2015.3.6-2015.3.8)] 2015 IEEE International Conference on Mechatronics (ICM) - Use of MEMS accelerometers for load position estimation of ball-screw driven table systemsWatanabe, Koji; Ito, Kazuaki; Inuzuka, Katsumi; Antonello, Riccardo; Oboe, Roberto · 2015