High speed microfluidic prototyping by programmable proximity aperture MeV ion beam lithography

Puttaraksa, Nitipon; Napari, Mari; Meriläinen, Leena; Whitlow, Harry J.; Sajavaara, Timo; Gilbert, Leona

期刊名称Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
作者Puttaraksa, Nitipon; Napari, Mari; Meriläinen, Leena; Whitlow, Harry J.; Sajavaara, Timo; Gilbert, Leona
卷第306卷
印刷ISSN0168-583X
文件大小790.37KB
发表时间2013-07
DOI10.1016/j.nimb.2012.12.033
页码302-306

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