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The Effect of Silicon Nitride Stoichiometry on Charging Mechanisms in RF-MEMS Capacitive SwitchesTavassolian, N.; Koutsoureli, M.; Papandreou, E.; Papaioannou, G.; Lacroix, B.; Liu, Z.; Papapolymerou, J. · IEEE Transactions on Microwave Theory and Techniques · 2009