Fabrication of Electroosmotic Flow Pump on Polymethylemethacrylate Substrate Using Hot Embossing

Saito, Hirofumi; Komatsuzaki, Hiroki; Ikoma, Ryuta; Komori, Takayuki; Kuroda, Keigo; Kimura, Yohta; Fukushi, Yudai; Maenosono, Hirotaka; Koide, Syohei; Satano, Masahiro; Nishioka, Yasushiro

期刊名称Key Engineering Materials
作者Saito, Hirofumi; Komatsuzaki, Hiroki; Ikoma, Ryuta; Komori, Takayuki; Kuroda, Keigo; Kimura, Yohta; Fukushi, Yudai; Maenosono, Hirotaka; Koide, Syohei; Satano, Masahiro; Nishioka, Yasushiro
卷第538卷
电子ISSN1662-9795
文件大小443.04KB
发表时间2013-1
DOI10.4028/www.scientific.net/KEM.538.125
页码125-128

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Fabrication of Electroosmotic Flow Pump on Polymethylemethacrylate Substrate Using Hot Embossing