Instability of Contact Resistance in MEMS and NEMS DC Switches under Low Force: the Role of Alien Films on the Contact Surface
- 期刊名称Sensors
- 作者Qiu, Haodong; Wang, Hong; Ke, Feixiang
- 卷第13卷
- 期第12期
- 电子ISSN1424-8220
- 文件大小1107.06KB
- 发表时间2013-11-28
- DOI10.3390/s131216360
- 页码16360-16371
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