[IEEE 2014 IEEE International Reliability Physics Symposium (IRPS) - Waikoloa, HI, USA (2014.6.1-2014.6.5)] 2014 IEEE International Reliability Physics Symposium - Impact of ionic drift and vacancy defect passivation on TDDB statistics and lifetime enhancement of metal gate high-κ stacks
Raghavan, Nagarajan; Pey, Kin Leong; Frey, Daniel D.; Bosman, Michel
- 作者Raghavan, Nagarajan; Pey, Kin Leong; Frey, Daniel D.; Bosman, Michel
- 文件大小478.22KB
- 发表时间2014
- DOI10.1109/IRPS.2014.6860666