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[IEEE 2014 IEEE International Reliability Physics Symposium (IRPS) - Waikoloa, HI, USA (2014.6.1-2014.6.5)] 2014 IEEE International Reliability Physics Symposium - Impact of ionic drift and vacancy defect passivation on TDDB statistics and lifetime enhancement of metal gate high-κ stacks

[IEEE 2014 IEEE International Reliability Physics Symposium (IRPS) - Waikoloa, HI, USA (2014.6.1-2014.6.5)] 2014 IEEE International Reliability Physics Symposium - Impact of ionic drift and vacancy defect passivation on TDDB statistics and lifetime enhancement of metal gate high-κ stacks

Raghavan, Nagarajan; Pey, Kin Leong; Frey, Daniel D.; Bosman, Michel
  • 作者Raghavan, Nagarajan; Pey, Kin Leong; Frey, Daniel D.; Bosman, Michel
  • 文件大小478.22KB
  • 发表时间2014
  • DOI10.1109/IRPS.2014.6860666
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