Focused ion beam contact to non-volatile memory cells
- 期刊名称Microelectronics Reliability
- 作者Helfmeier, Clemens; Schlangen, Rudolf; Boit, Christian
- 卷第54卷
- 印刷ISSN0026-2714
- 文件大小1268.19KB
- 发表时间2014-09
- DOI10.1016/j.microrel.2014.07.017
- 页码1798-1801
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