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[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - P/sup +/ silicon recessed micromechanical structures for MEMS applicationsPal, P.; Tuli, S.; Chandra, S. · 2003