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Measuring CET of High-k Dielectrics with Novel Kinetic Approach Using Micro-Site Corona - Kelvin Method

Measuring CET of High-k Dielectrics with Novel Kinetic Approach Using Micro-Site Corona - Kelvin Method

Marinskiy, D.; Loy, T. C.; Yeh, H. C.; Wilson, M.; Lagowski, J.

期刊名称ECS Transactions
作者Marinskiy, D.; Loy, T. C.; Yeh, H. C.; Wilson, M.; Lagowski, J.
卷第61卷
期第2期
印刷ISSN1938-6737
电子ISSN1938-5862
文件大小388.38KB
发表时间2014-03-24
DOI10.1149/06102.0061ecst
页码61-70

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