![[IEEE 2014 International 3D Systems Integration Conference (3DIC) - Kinsdale, Ireland (2014.12.1-2014.12.3)] 2014 International 3D Systems Integration Conference (3DIC) - Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example]()
[IEEE 2014 International 3D Systems Integration Conference (3DIC) - Kinsdale, Ireland (2014.12.1-2014.12.3)] 2014 International 3D Systems Integration Conference (3DIC) - Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system exampleBieniek, T.; Janczyk, G.; Ekwinska, M.; Budzynski, T.; Gluszko, G.; Grabiec, P.; Kociubinski, A. · 2014