Effective EUV Resist Outgassing Barrier Using a Novel Top Coat Material
- 期刊名称Journal of Photopolymer Science and Technology
- 作者Wang, Xiaowei; Pawlowski, Georg; Okayasu, Tetsuo; Suzuki, Masato; Hama, Yusuke; Watanabe, Takeo; Harada, Tetsuo; Kinoshita, Hiroo
- 卷第28卷
- 期第1期
- 印刷ISSN0914-9244
- 电子ISSN1349-6336
- 文件大小728.11KB
- 发表时间2015
- DOI10.2494/photopolymer.28.111
- 页码111-117
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