![High speed microfluidic prototyping by programmable proximity aperture MeV ion beam lithography]()
High speed microfluidic prototyping by programmable proximity aperture MeV ion beam lithographyPuttaraksa, Nitipon; Napari, Mari; Meriläinen, Leena; Whitlow, Harry J.; Sajavaara, Timo; Gilbert, Leona · Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms · 2013