![SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Micro-Optical Technologies for Measurement, Sensors, and Microsystems - <title>Micro-optics for sensor applications</title>]()
SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Micro-Optical Technologies for Measurement, Sensors, and Microsystems - <title>Micro-optics for sensor applications</title>Nussbaum, Philippe; Voelkel, Reinhard; Herzig, Hans Peter; Daendliker, Rene; Parriaux, Olivier M. · 1996