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The effect of substrate holder size on the electric field and discharge plasma on diamond-film formation at high deposition rates during MPCVD

The effect of substrate holder size on the electric field and discharge plasma on diamond-film formation at high deposition rates during MPCVD

AN, Kang; CHEN, Liangxian; LIU, Jinlong; ZHAO, Yun; YAN, Xiongbo; HUA, Chenyi; GUO, Jianchao; WEI, Junjun; HEI, Lifu; LI, Chengming; LU, Fanxiu
  • 期刊名称Plasma Science and Technology
  • 作者AN, Kang; CHEN, Liangxian; LIU, Jinlong; ZHAO, Yun; YAN, Xiongbo; HUA, Chenyi; GUO, Jianchao; WEI, Junjun; HEI, Lifu; LI, Chengming; LU, Fanxiu
  • 卷第19卷
  • 期第9期
  • 印刷ISSN1009-0630
  • 文件大小2316.08KB
  • 发表时间2017-09-01
  • DOI10.1088/2058-6272/aa7458
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