![[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Fine fabrication of gainasp-inp photonic crystal by Hi/Xe ICP etching using electron beam resist mask]()
[IEEE Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Osaka, Japan (2004.10.26-2004.10.29)] Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Fine fabrication of gainasp-inp photonic crystal by Hi/Xe ICP etching using electron beam resist maskFujita, M.; Sugitatsu, A.; Uesugi, T.; Noda, S. · 2004