海量图书期刊资源,随时随地畅享阅读乐趣
Al3O3 thin film growth on Si(100) using binary reaction sequence chemistryA.W. Ott; J.W. Klaus; J.M. Johnson; S.M. George · 1997
Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistryA.W. Ott; K.C. McCarley; J.W. Klaus; J.D. Way; S.M. George · 1996
Erratum to “Al2O3 thin film growth on Si (100) using binary reaction sequence chemistry” [Thin Solid Films 292 (1997) 135–144]A.W. Ott; J.W. Klaus; J.M. Johnson; S.M. George · 2009