An Investigation of Polyoxometalate Hybrid Materials as Patternable Dielectrics and Lithographic Resists
- 期刊名称Materials
- 作者Hardie, Brandon; Roll, Mark
- 卷第10卷
- 期第11期
- 电子ISSN1996-1944
- 文件大小6040.53KB
- 发表时间2017-11-15
- DOI10.3390/ma10111309
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