Handbook of Thin Film Deposition || A Perspective on Today’s Scaling Challenges and Possible Future Directions * *This chapter appeared in Solid State Electronics, 51(4) (2007) 518–525. Copyright © 2007 Elsevier Ltd.
- 作者Dennard, Robert H.
- 文件大小1367.89KB
- 发表时间2018
- DOI10.1016/B978-0-12-812311-9.00001-3
- 页码3-18
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