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[IEEE 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Roma (2018.5.22-2018.5.25)] 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Measurement uncertainties in electrostatic actuated MEMS resonators

[IEEE 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Roma (2018.5.22-2018.5.25)] 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Measurement uncertainties in electrostatic actuated MEMS resonators

Iqbal, Faisal; Lee, Byeungleul

作者Iqbal, Faisal; Lee, Byeungleul
文件大小354.40KB
发表时间2018
DOI10.1109/DTIP.2018.8394224
页码1-4

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