A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
- 期刊名称Micromachines
- 作者Perelló-Roig, Rafel; Verd, Jaume; Barceló, Joan; Bota, Sebastià; Segura, Jaume
- 卷第9卷
- 期第10期
- 电子ISSN2072-666X
- 文件大小3997.21KB
- 发表时间2018-09-22
- DOI10.3390/mi9100484
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