![Soft X-ray irradiation effect on the fluorinated DLC film]()
Soft X-ray irradiation effect on the fluorinated DLC filmTakamatsu, Hiroki; Niibe, Masahito; Zhou, XiaoLong; Komatsu, Keiji; Saitoh, Hidetoshi; Akasaka, Hiroki; Saiga, Akihiro; Tamada, Koji; Tagawa, Masahito; Yokota, Kumiko; Furuyama, Yuichi; Kanda, Kazuhiro · Diamond and Related Materials · 2017